In comparison to State of the Art filtered arc sources, the Filter-HCA eliminates droplet contaminations much more effectively. A production yield of 93% has been achieved at a discrimination level of 14 nm. Less than 3 particles larger than 14 nm could be found per square meter.

Droplet
number in
dependence
on its
diameter
for dc-arc,
pulsed arc,
commercial
filter arc
source and
actual
ArcPrecision
Filter-HCA-
source

Efficiency of droplet elimination
for different filtered
and unfiltered
arc sources