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Aim: Increase of information density from 100 to 1000 Gb/in²
by decreasing the top coat thickness from 7 nm to about 1 nm
Design of the new filtered arc source for industrial usage
Testing of the new industrial source in the lab of Arc Precision
Second
generation
filter-HCA
source at
CirculusM12
in Mainz/
Germany
First
generation
filter-HCA
source at
hard disk
production
tool
CirculusM12
at the IBM
production
line in Mainz/
Germany
AFM investigations
of 10 nm carbon
films on silicon
deposited by
60°- (upper),
120°-filter
(middle)
and with
improved
design of
the 120°-filter
unit (lower)
© IBM Mainz
© IBM Mainz
© IBM Mainz
Magnetic tests: funktional properties of magnetic layers
--> no influence in comparison to standard
carbon overcoat
Climate tests: standard corrosion tests
--> corrosion resistance guarenateed alredy with
16 Å (=1.6 nm) films
Glide test: Detection of particles on disk surface
--> yield: 80% bis 90%
Smooth
carbon film
on hard disk
without any
particles
© IBM Mainz
Results: RMS-
roughness
for Filter-
HCA
coatings at
different
thicknesses
and
substrate
temperatu-
res
© IBM Mainz
Results: Scratch
resistance
in comparison
to state-
of-the-art
magnetron
deposition
Efficiency of droplet elimination
in comparison to a commercial state of the art filter source
• Demonstration of particle free deposition
• homogeneity: ± 10,0 % over 95 mm ssubstrate
• Rate: 5 nm/s (on 95 mm substrate)
• High deposition rate - coating time below 1 sec per disk
• Filter module tested under industrial disk fabrication conditions
• density and the scratching resistance remarkably higher than
standard magnetron sputtered carbon
• pinhole-free arc films down to a thickness of 2 nm on disk
and slider
• magnetic layer is left undamaged during the HCA deposition
process
Neuer Absatz
