Aim: Increase of information density from 100 to 1000 Gb/in² by decreasing the top coat thickness from 7 nm to about 1 nm
Design of the new filtered arc source for industrial usage
Testing of the new industrial source in the lab of Arc Precision
Second generation filter-HCA source at CirculusM12 in Mainz/ Germany
First generation filter-HCA source at hard disk production tool CirculusM12 at the IBM production line in Mainz/ Germany
AFM investigations of 10 nm carbon films on silicon deposited by 60°- (upper), 120°-filter (middle) and with improved design of the 120°-filter unit (lower)
© IBM Mainz
© IBM Mainz
© IBM Mainz
Magnetic tests: funktional properties of magnetic layers --> no influence in comparison to standard carbon overcoat
Climate tests: standard corrosion tests --> corrosion resistance guarenateed alredy with 16 Å (=1.6 nm) films
Glide test: Detection of particles on disk surface --> yield: 80% bis 90%
Smooth carbon film on hard disk without any particles
© IBM Mainz
Results: RMS- roughness for Filter- HCA coatings at different thicknesses and substrate temperatu- res
© IBM Mainz
Results: Scratch resistance in comparison to state- of-the-art magnetron deposition
Efficiency of droplet elimination in comparison to a commercial state of the art filter source
• Demonstration of particle free deposition • homogeneity: ± 10,0 % over 95 mm ssubstrate • Rate: 5 nm/s (on 95 mm substrate) • High deposition rate - coating time below 1 sec per disk • Filter module tested under industrial disk fabrication conditions • density and the scratching resistance remarkably higher than standard magnetron sputtered carbon • pinhole-free arc films down to a thickness of 2 nm on disk and slider • magnetic layer is left undamaged during the HCA deposition process
Neuer Absatz
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